Boron Trifluoride, BF3, is a colourless, toxic, nonflammable, corrosive, high-pressure gas.
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Applications
In the semiconductor industry, boron trifluoride is used for:
- p-type diffusion in silicon
- ion implantation.
Materials Compatibility
Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel.
Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; Polyvinylchloride; PVDF.
Elastomers: Viton.