Boron trifluoroide

Boron trifluoroide

Boron Trifluoride, BF3, is a colourless, toxic, nonflammable, corrosive, high-pressure gas.

 

Applications

In the semiconductor industry, boron trifluoride is used for:

  • p-type diffusion in silicon
  • ion implantation.

 

Materials Compatibility

Metals: Brass; Stainless Steel; Carbon Steel; Copper; Monel.

Plastics: Kel-F; PTFE, FEP, and PFA Fluoropolymers resins; Tefzel; Polyvinylchloride; PVDF.

Elastomers: Viton.

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